Inventor

SAKAI KEI

JP30 patents

⚠️ This page may combine multiple inventors who share the name “SAKAI KEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAKAI KEI

HITACHI HIGH TECH CORP

Overlay error measuring device and computer program for causing computer to measure pattern

Semiconductor circuit pattern measuring apparatus and method

Image-forming device, and dimension measurement device

Electron beam observation device, electron beam observation system, and control method of electron beam observation device

Image-forming device, and dimension measurement device

Pattern measurement apparatus and defect inspection apparatus

Image-forming device, and dimension measurement device

Charged particle beam device for imaging vias inside trenches

Charged particle beam device

Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement

Electron beam device and image processing method

Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program

Charged particle beam apparatus and method for calculating roughness index

Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device

Charged particle beam device

Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component

Correction coefficient calculation device, correction coefficient calculation method, and correction coefficient calculation program

Overlay measurement system and overlay measurement device for overlay error measurement using electron microscopy

Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device

Charged particle beam apparatus

MITSUBISHI HEAVY IND LTD

Method and device for integrative control of gas engine

Method and device for integrative control of gas engine

Method and device for integrative control of gas engine

Method and device for controlling starting of gas engine

SAKAI KEI

Pattern measuring apparatus

Pattern-searching condition determining method, and pattern-searching condition setting device

SATOU KAZUYUKI

Gas diffusion electrode and production method for same; membrane electrode assembly and production method for same

IDEN HIROSHI

Electrocatalyst for solid polymer fuel cell

ISHIJIMA TATSUAKI

Specimen potential measuring method, and charged particle beam device