Inventor
SHYU DEH-MING
TW14 patents
⚠️ This page may combine multiple inventors who share the name “SHYU DEH-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
8 patentsUS8830458B2Sep 9, 2014
Measurement systems and measurement methods
IND TECH RES INST4 citations72
US7652776B2Jan 26, 2010
Structure and method for overlay measurement
IND TECH RES INST4 citations62
US7430052B2Sep 30, 2008
Method for correlating the line width roughness of gratings and method for measurement
IND TECH RES INST6 citations62
US7800824B2Sep 21, 2010
Method for designing gratings
IND TECH RES INST2 citations61
US7864324B2Jan 4, 2011
Reflective scatterometer
IND TECH RES INST4 citations60
US7872741B2Jan 18, 2011
Method and apparatus for scatterfield microscopical measurement
IND TECH RES INST3 citations58
US7355713B2Apr 8, 2008
Method for inspecting a grating biochip
IND TECH RES INST0 citations51
US9182681B2Nov 10, 2015
Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscope
IND TECH RES INST0 citations41