Inventor
GOTO YASUNORI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “GOTO YASUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
10 patentsUS7394070B2Jul 1, 2008
Method and apparatus for inspecting patterns
HITACHI HIGH TECH CORP14 citations83
US10720307B2Jul 21, 2020
Electron microscope device and inclined hole measurement method using same
HITACHI HIGH TECH CORP2 citations72
US10094658B2Oct 9, 2018
Overlay measurement method, device, and display device
HITACHI HIGH TECH CORP2 citations72
US9390885B2Jul 12, 2016
Superposition measuring apparatus, superposition measuring method, and superposition measuring system
HITACHI HIGH TECH CORP3 citations72
US12176181B2Dec 24, 2024
Pattern inspecting device
HITACHI HIGH TECH CORP1 citations62
US10692693B2Jun 23, 2020
System and method for measuring patterns
HITACHI HIGH TECH CORP1 citations62
US10996569B2May 4, 2021
Measurement device, method and display device
HITACHI HIGH TECH CORP0 citations51
US12243711B2Mar 4, 2025
Method, apparatus, and program for determining condition related to captured image of charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations50
US11626266B2Apr 11, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations49
US9536700B2Jan 3, 2017
Sample observation device
HITACHI HIGH TECH CORP0 citations41