Inventor
LATYPOV AZAT M
US17 patents
⚠️ This page may combine multiple inventors who share the name “LATYPOV AZAT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
15 patentsUS7580559B2Aug 25, 2009
System and method for calibrating a spatial light modulator
ASML HOLDING NV34 citations92
US6965436B2Nov 15, 2005
System and method for calibrating a spatial light modulator array using shearing interferometry
ASML HOLDING NV15 citations92
US6963434B1Nov 8, 2005
System and method for calculating aerial image of a spatial light modulator
ASML HOLDING NV20 citations92
US6847461B1Jan 25, 2005
System and method for calibrating a spatial light modulator array using shearing interferometry
ASML HOLDING NV27 citations92
US7158238B2Jan 2, 2007
System and method for calibrating a spatial light modulator array using shearing interferometry
ASML HOLDING NV11 citations83
US7423732B2Sep 9, 2008
Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane
ASML HOLDING NV8 citations73
US7102733B2Sep 5, 2006
System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography tool
ASML HOLDING NV8 citations72
US7209275B2Apr 24, 2007
Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation
ASML HOLDING NV6 citations71
US7889411B2Feb 15, 2011
System and method for calculating aerial image of a spatial light modulator
ASML HOLDING NV3 citations62
US7688423B2Mar 30, 2010
Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones
ASML HOLDING NV3 citations62
US7542013B2Jun 2, 2009
System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode
ASML HOLDING NV2 citations62
US7394584B2Jul 1, 2008
System and method for calculating aerial image of a spatial light modulator
ASML HOLDING NV3 citations62
US7826142B2Nov 2, 2010
Method for improved optical design using deterministically defined surfaces
ASML HOLDING NV4 citations60
US7773287B2Aug 10, 2010
Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation
ASML HOLDING NV3 citations57
US7713667B2May 11, 2010
System and method for generating pattern data used to control a pattern generator
ASML HOLDING NV1 citations52