Inventor
BLEEKER ARNO JAN
NL84 patents
⚠️ This page may combine multiple inventors who share the name “BLEEKER ARNO JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
38 patentsUS7009682B2Mar 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV200 citations99
US7791732B2Sep 7, 2010
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV80 citations98
US6778257B2Aug 17, 2004
Imaging apparatus
ASML NETHERLANDS BV953 citations97
US7119881B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV58 citations96
US9946167B2Apr 17, 2018
Metrology method and inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV18 citations94
US6429440B1Aug 6, 2002
Lithography apparatus having a dynamically variable illumination beam
ASML NETHERLANDS BV25 citations93
US8760662B2Jun 24, 2014
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV16 citations92
US8054467B2Nov 8, 2011
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV15 citations92
US7177012B2Feb 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV30 citations92
US10712667B2Jul 14, 2020
Optical device and associated system
ASML NETHERLANDS BV22 citations91
US6870601B2Mar 22, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV24 citations89
US8018578B2Sep 13, 2011
Pellicle, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations84
US7440078B2Oct 21, 2008
Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units
ASML NETHERLANDS BV13 citations84
US7141340B2Nov 28, 2006
Lithographic apparatus, programmable patterning structure, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations84
US7133118B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US10241055B2Mar 26, 2019
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV3 citations83
US7548302B2Jun 16, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7023525B2Apr 4, 2006
Imaging apparatus
ASML NETHERLANDS BV13 citations82
US7894037B2Feb 22, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations81
US7697128B2Apr 13, 2010
Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object
ASML NETHERLANDS BV8 citations80
US7385677B2Jun 10, 2008
Lithographic apparatus and device manufacturing method that limits a portion of a patterning device used to pattern a beam
ASML NETHERLANDS BV5 citations74
US7321417B2Jan 22, 2008
Spatial light modulator, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7196772B2Mar 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations74
US7154587B2Dec 26, 2006
Spatial light modulator, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7016015B2Mar 21, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations74
US6999161B2Feb 14, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations74
US6992754B2Jan 31, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations74
US6864958B2Mar 8, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US6753946B2Jun 22, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations74
US10955353B2Mar 23, 2021
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations73
US7433033B2Oct 7, 2008
Inspection method and apparatus using same
ASML NETHERLANDS BV7 citations73
US7894041B2Feb 22, 2011
Limiting a portion of a patterning device used to pattern a beam
ASML NETHERLANDS BV3 citations63
US7522266B2Apr 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7183566B2Feb 27, 2007
Lithographic apparatus for manufacturing a device
ASML NETHERLANDS BV3 citations63
US7173687B2Feb 6, 2007
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV2 citations63
US7161661B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7123348B2Oct 17, 2006
Lithographic apparatus and method utilizing dose control
ASML NETHERLANDS BV5 citations63
US11525786B2Dec 13, 2022
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations62
ASML HOLDING NV
4 patentsUS7400382B2Jul 15, 2008
Light patterning device using tilting mirrors in a superpixel form
ASML HOLDING NV24 citations92
US7411652B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML HOLDING NV13 citations84
US7046413B2May 16, 2006
System and method for dose control in a lithographic system
ASML HOLDING NV6 citations72
US7859647B2Dec 28, 2010
Lithographic apparatus and device manufacturing method
ASML HOLDING NV7 citations71
SMILDE HENDRIK JAN HIDDE
2 patentsUS8411287B2Apr 2, 2013
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate
SMILDE HENDRIK JAN HIDDE85 citations97
US9140998B2Sep 22, 2015
Metrology method and inspection apparatus, lithographic system and device manufacturing method
SMILDE HENDRIK JAN HIDDE24 citations92
(unassigned)
1 patentASML NETHERLAND BV
1 patentDEN BOEF ARIE JEFFREY MARIA
1 patentPUYT MICHIEL
1 patentASM LITHOGRAPHY BV
1 patentBLEEKER ARNO JAN
1 patentShowing the top 50 of 84 patents by PatentIndex Score.