Inventor
JIA LINGYUN
FI6 patents
Patents
6 patentsUS10991573B2Apr 27, 2021
Uniform deposition of SiOC on dielectric and metal surfaces
ASM IP HOLDING BV12 citations85
US11170993B2Nov 9, 2021
Selective PEALD of oxide on dielectric
ASM IP HOLDING BV8 citations83
US11728164B2Aug 15, 2023
Selective PEALD of oxide on dielectric
ASM IP HOLDING BV4 citations74
US11158500B2Oct 26, 2021
Plasma enhanced deposition processes for controlled formation of oxygen containing thin films
ASM IP HOLDING BV4 citations72
US11776807B2Oct 3, 2023
Plasma enhanced deposition processes for controlled formation of oxygen containing thin films
ASM IP HOLDING BV0 citations62
US11501965B2Nov 15, 2022
Plasma enhanced deposition processes for controlled formation of metal oxide thin films
ASM IP HOLDING BV1 citations62