Inventor
GDOR ITAY
IL9 patents
Patents
9 patentsUS11378394B1Jul 5, 2022
On-the-fly scatterometry overlay metrology target
KLA CORP7 citations80
US11796925B2Oct 24, 2023
Scanning overlay metrology using overlay targets having multiple spatial frequencies
KLA CORP6 citations72
US11409205B2Aug 9, 2022
Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices
KLA CORP2 citations72
US12105431B2Oct 1, 2024
Annular apodizer for small target overlay measurement
KLA CORP0 citations52
US12422363B2Sep 23, 2025
Scanning scatterometry overlay metrology
KLA CORP0 citations50
US12373936B2Jul 29, 2025
System and method for overlay metrology using a phase mask
KLA CORP0 citations50
US12105414B2Oct 1, 2024
Targets for diffraction-based overlay error metrology
KLA CORP0 citations50
US12487190B2Dec 2, 2025
System and method for isolation of specific fourier pupil frequency in overlay metrology
KLA CORP0 citations47
US12504697B2Dec 23, 2025
Single grab pupil landscape via broadband illumination
KLA CORP0 citations44