Inventor
VERSTRAETEN BERT
BE8 patents
Patents
8 patentsUS12007697B2Jun 11, 2024
Method for process metrology
ASML NETHERLANDS BV4 citations73
US11385551B2Jul 12, 2022
Method for process metrology
ASML NETHERLANDS BV2 citations72
US10747122B2Aug 18, 2020
Method of measuring a parameter of a device manufacturing process, metrology apparatus, substrate, target, device manufacturing system, and device manufacturing method
ASML NETHERLANDS BV2 citations71
US10677589B2Jun 9, 2020
Substrate, metrology apparatus and associated methods for a lithographic process
ASML NETHERLANDS BV1 citations62
US11506566B2Nov 22, 2022
Method of processing data, method of obtaining calibration data
ASML NETHERLANDS BV1 citations53
US10871367B2Dec 22, 2020
Substrate, metrology apparatus and associated methods for a lithographic process
ASML NETHERLANDS BV0 citations51
US11054754B2Jul 6, 2021
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations48
US10571363B2Feb 25, 2020
Method of determining an optimal focus height for a metrology apparatus
ASML NETHERLANDS BV0 citations47