Inventor
LEVITOV FELIX
US3 patents
Patents
3 patentsUS11695060B2Jul 4, 2023
Ion implantation to form trench-bottom oxide of MOSFET
APPLIED MATERIALS INC0 citations60
US11387338B1Jul 12, 2022
Methods for forming planar metal-oxide-semiconductor field-effect transistors
APPLIED MATERIALS INC1 citations53
US11527412B2Dec 13, 2022
Method for increasing photoresist etch selectivity to enable high energy hot implant in SiC devices
APPLIED MATERIALS INC0 citations50