Inventor
HUANG PO-CHIH
TW8 patents
⚠️ This page may combine multiple inventors who share the name “HUANG PO-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS12482671B2Nov 25, 2025
Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12249493B2Mar 11, 2025
Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11972957B2Apr 30, 2024
Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11594401B2Feb 28, 2023
Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US12283514B2Apr 22, 2025
Method and system for processing wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12055228B2Aug 6, 2024
Valve for throttling gas flow from a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12394635B2Aug 19, 2025
Systems and methods for processing a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44