Inventor
GAURY BENOIT HERVE
NL4 patents
Patents
4 patentsUS12494341B2Dec 9, 2025
Delay time measurement method and system
ASML NETHERLANDS BV0 citations54
US12092964B2Sep 17, 2024
Optically determining electrical contact between metallic features in different layers in a structure
ASML NETHERLANDS BV0 citations53
US12567558B2Mar 3, 2026
Systems and methods for pulsed voltage contrast detection and capture of charging dynamics
ASML NETHERLANDS BV0 citations48
US12422757B2Sep 23, 2025
Mark to be projected on an object during a lithographic process and method for designing a mark
ASML NETHERLANDS BV0 citations42