Inventor
TOYODA KEIGO
JP7 patents
Patents
7 patentsUS11056370B2Jul 6, 2021
Method for processing workpiece
TOKYO ELECTRON LTD1 citations61
US11832373B2Nov 28, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11470712B2Oct 11, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11562889B2Jan 24, 2023
Plasma processing apparatus and gas introducing method
TOKYO ELECTRON LTD1 citations57
US9818582B2Nov 14, 2017
Plasma processing method
TOKYO ELECTRON LTD1 citations48
US9728418B2Aug 8, 2017
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations45
US10163607B2Dec 25, 2018
Temperature control method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38