Inventor
BASELMANS JOHANNES JACOBUS MATHEUS
NL114 patents
⚠️ This page may combine multiple inventors who share the name “BASELMANS JOHANNES JACOBUS MATHEUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
39 patentsUS7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7880860B2Feb 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV31 citations96
US7463330B2Dec 9, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV48 citations96
US7433015B2Oct 7, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV39 citations96
US7545481B2Jun 9, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations95
US7528929B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV46 citations95
US9134622B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations92
US7898642B2Mar 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations92
US7834980B2Nov 16, 2010
Lithographic apparatus and method
ASML NETHERLANDS BV31 citations87
US10345712B2Jul 9, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9989864B2Jun 5, 2018
Lithographic method and apparatus
ASML NETHERLANDS BV8 citations84
US9952515B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations84
US9846368B2Dec 19, 2017
Lithographic apparatus and device manufacturing method utilizing data filtering
ASML NETHERLANDS BV9 citations84
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9703210B2Jul 11, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9134623B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7728954B2Jun 1, 2010
Reflective loop system producing incoherent radiation
ASML NETHERLANDS BV8 citations84
US7500218B2Mar 3, 2009
Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same
ASML NETHERLANDS BV16 citations84
US7626684B2Dec 1, 2009
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV14 citations80
US7864295B2Jan 4, 2011
Lithographic apparatus and device manufacturing method utilizing data filtering
ASML NETHERLANDS BV4 citations74
US7670730B2Mar 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations74
US7643127B2Jan 5, 2010
Prewetting of substrate before immersion exposure
ASML NETHERLANDS BV5 citations74
US10338478B2Jul 2, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10234768B2Mar 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9829799B2Nov 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9606448B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9261402B2Feb 16, 2016
Lithographic method and apparatus
ASML NETHERLANDS BV5 citations73
US9304411B2Apr 5, 2016
Lithographic method and apparatus
ASML NETHERLANDS BV3 citations72
US10401735B2Sep 3, 2019
Lithographic method and apparatus
ASML NETHERLANDS BV2 citations71
US7961293B2Jun 14, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations71
US10078272B2Sep 18, 2018
Lithographic method and apparatus
ASML NETHERLANDS BV2 citations70
US9817320B2Nov 14, 2017
Lithographic method and apparatus
ASML NETHERLANDS BV2 citations68
US10996567B2May 4, 2021
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations65
US10444637B2Oct 15, 2019
Optical system and method
ASML NETHERLANDS BV1 citations63
US8049864B2Nov 1, 2011
Device manufacturing method and lithographic apparatus
ASML NETHERLANDS BV2 citations63
US7649676B2Jan 19, 2010
System and method to form unpolarized light
ASML NETHERLANDS BV2 citations63
US11561478B2Jan 24, 2023
Determining subset of components of an optical characteristic of patterning apparatus
ASML NETHERLANDS BV0 citations62
US9791787B2Oct 17, 2017
Lithographic method and apparatus
ASML NETHERLANDS BV1 citations62
STREEFKERK BOB
3 patentsUS8634056B2Jan 21, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB10 citations92
US8547519B2Oct 1, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB8 citations84
US9104117B2Aug 11, 2015
Lithographic apparatus having a liquid detection system
STREEFKERK BOB2 citations63
JANSEN HANS
3 patentsUS8941811B2Jan 27, 2015
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8638419B2Jan 28, 2014
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations83
US8115899B2Feb 14, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS4 citations73
ASML HOLDING NV
2 patentsTINNEMANS PATRICIUS ALOYSIUS JACOBUS
2 patentsLOOPSTRA ERIK ROELOF
1 patentShowing the top 50 of 114 patents by PatentIndex Score.