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Inventor

WALTER ALAN E

US9 patents
⚠️ This page may combine multiple inventors who share the name “WALTER ALAN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CFM TECHNOLOGIES LTD

3 patents
US4917123AApr 17, 1990

Apparatus for treating wafers with process fluids

CFM TECHNOLOGIES LTD223 citations97
US4778532AOct 18, 1988

Process and apparatus for treating wafers with process fluids

CFM TECHNOLOGIES LTD259 citations97
US4633893AJan 6, 1987

Apparatus for treating semiconductor wafers

CFM TECHNOLOGIES LTD102 citations95

CFM TECHN RES ASS

2 patents
US4984597AJan 15, 1991

Apparatus for rinsing and drying surfaces

CFM TECHN RES ASS249 citations97
US4911761AMar 27, 1990

Process and apparatus for drying surfaces

CFM TECHN RES ASS214 citations97

CFMT INC

2 patents
US6348101B1Feb 19, 2002

Methods for treating objects

CFMT INC59 citations95
US6143087ANov 7, 2000

Methods for treating objects

CFMT INC62 citations95

CFM TECHNOLOGIES INC

1 patent
US4899767AFeb 13, 1990

Method and system for fluid treatment of semiconductor wafers

CFM TECHNOLOGIES INC137 citations97

MCCONNELL CHRISTOPHER F

1 patent
US4795497AJan 3, 1989

Method and system for fluid treatment of semiconductor wafers

MCCONNELL CHRISTOPHER F86 citations95