Inventor
NAGAYAMA NOBUYUKI
JP36 patents
⚠️ This page may combine multiple inventors who share the name “NAGAYAMA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
18 patentsUS10622196B2Apr 14, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD341 citations99
US7780786B2Aug 24, 2010
Internal member of a plasma processing vessel
TOKYO ELECTRON LTD51 citations98
US6899786B2May 31, 2005
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism
TOKYO ELECTRON LTD52 citations95
US6790289B2Sep 14, 2004
Method of cleaning a plasma processing apparatus
TOKYO ELECTRON LTD22 citations92
US8877002B2Nov 4, 2014
Internal member of a plasma processing vessel
TOKYO ELECTRON LTD7 citations84
US7481903B2Jan 27, 2009
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism
TOKYO ELECTRON LTD11 citations83
US8896210B2Nov 25, 2014
Plasma processing apparatus and method
TOKYO ELECTRON LTD10 citations79
US10566175B2Feb 18, 2020
Focus ring and plasma processing apparatus
TOKYO ELECTRON LTD2 citations73
US9818583B2Nov 14, 2017
Electrode plate for plasma etching and plasma etching apparatus
TOKYO ELECTRON LTD2 citations73
US10138167B2Nov 27, 2018
Thermal spray material, thermal spray coating and thermal spray coated article
TOKYO ELECTRON LTD3 citations72
US10106466B2Oct 23, 2018
Thermal spray material, thermal spray coating and thermal spray coated article
TOKYO ELECTRON LTD3 citations72
US10227263B2Mar 12, 2019
Thermal spray material and thermal spray coated article
TOKYO ELECTRON LTD1 citations62
US8945313B2Feb 3, 2015
Vacuum exhaust method and a substrate processing apparatus therefor
TOKYO ELECTRON LTD2 citations62
US10766822B2Sep 8, 2020
Thermal spray material and thermal spray coated article
TOKYO ELECTRON LTD0 citations52
US8715782B2May 6, 2014
Surface processing method
TOKYO ELECTRON LTD0 citations52
US7892361B2Feb 22, 2011
In-chamber member, a cleaning method therefor and a plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US10106879B2Oct 23, 2018
Thermal spray material, thermal spray coating and thermal spray coated article
TOKYO ELECTRON LTD0 citations51
US10768089B2Sep 8, 2020
Particle collecting apparatus and particle collecting system
TOKYO ELECTRON LTD0 citations36
NAGAYAMA NOBUYUKI
4 patentsUS8475622B2Jul 2, 2013
Method of reusing a consumable part for use in a plasma processing apparatus
NAGAYAMA NOBUYUKI2 citations61
US8221579B2Jul 17, 2012
Method of reusing a consumable part for use in a plasma processing apparatus
NAGAYAMA NOBUYUKI3 citations61
US8739732B2Jun 3, 2014
Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member
NAGAYAMA NOBUYUKI1 citations51
US8545672B2Oct 1, 2013
Plasma processing apparatus
NAGAYAMA NOBUYUKI0 citations37
TOCALO CO LTD
2 patentsSATOH NAOYUKI
2 patentsNIPPON TUNGSTEN
2 patentsUS11548827B2Jan 10, 2023
Member for plasma processing apparatus and plasma processing apparatus with the same
NIPPON TUNGSTEN0 citations62
US11434174B2Sep 6, 2022
Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body
NIPPON TUNGSTEN1 citations62