Inventor
SAGO YASUMI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SAGO YASUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
8 patentsUS7175737B2Feb 13, 2007
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP23 citations92
US7220319B2May 22, 2007
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP25 citations91
US7513063B2Apr 7, 2009
Substrate processing apparatus
CANON ANELVA CORP5 citations62
USRE42175EMar 1, 2011
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP2 citations61
US7976716B2Jul 12, 2011
Semiconductor device manufacturing method
CANON ANELVA CORP0 citations51
US7767056B2Aug 3, 2010
High-frequency plasma processing apparatus
CANON ANELVA CORP0 citations41
US7323081B2Jan 29, 2008
High-frequency plasma processing apparatus
CANON ANELVA CORP0 citations41
US8007633B2Aug 30, 2011
Surface processing apparatus
CANON ANELVA CORP0 citations40