Inventor
OKADA TAKUJI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OKADA TAKUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
6 patentsUS7175737B2Feb 13, 2007
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP23 citations92
US7220319B2May 22, 2007
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP25 citations91
US9607868B2Mar 28, 2017
Substrate heat treatment apparatus
CANON ANELVA CORP6 citations71
US7513063B2Apr 7, 2009
Substrate processing apparatus
CANON ANELVA CORP5 citations62
USRE42175EMar 1, 2011
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP2 citations61
US7976716B2Jul 12, 2011
Semiconductor device manufacturing method
CANON ANELVA CORP0 citations51