Inventor
IKEDA MASAYOSHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA MASAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
12 patentsUS7175737B2Feb 13, 2007
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP23 citations92
US7220319B2May 22, 2007
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP25 citations91
US9564360B2Feb 7, 2017
Substrate processing method and method of manufacturing semiconductor device
CANON ANELVA CORP7 citations80
US9601688B2Mar 21, 2017
Method of manufacturing magnetoresistive element and method of processing magnetoresistive film
CANON ANELVA CORP3 citations73
US7513063B2Apr 7, 2009
Substrate processing apparatus
CANON ANELVA CORP5 citations62
US9190287B2Nov 17, 2015
Method of fabricating fin FET and method of fabricating device
CANON ANELVA CORP3 citations61
USRE42175EMar 1, 2011
Electrostatic chucking stage and substrate processing apparatus
CANON ANELVA CORP2 citations61
US7976716B2Jul 12, 2011
Semiconductor device manufacturing method
CANON ANELVA CORP0 citations51
US10157961B2Dec 18, 2018
Method of manufacturing magnetoresistive element
CANON ANELVA CORP0 citations44
US7767056B2Aug 3, 2010
High-frequency plasma processing apparatus
CANON ANELVA CORP0 citations41
US7323081B2Jan 29, 2008
High-frequency plasma processing apparatus
CANON ANELVA CORP0 citations41
US8007633B2Aug 30, 2011
Surface processing apparatus
CANON ANELVA CORP0 citations40
SHOWA CORP
4 patentsUS10214070B2Feb 26, 2019
Vehicle height adjustment device
SHOWA CORP1 citations60
US10214069B2Feb 26, 2019
Vehicle height adjustment device
SHOWA CORP0 citations52
US10226978B2Mar 12, 2019
Vehicle height adjustment device
SHOWA CORP0 citations50
US10046615B2Aug 14, 2018
Vehicle height adjustment device
SHOWA CORP0 citations41
ANELVA CORP
3 patentsUS6532796B1Mar 18, 2003
Method of substrate temperature control and method of assessing substrate temperature controllability
ANELVA CORP26 citations92
US6774570B2Aug 10, 2004
RF plasma processing method and RF plasma processing system
ANELVA CORP15 citations83
US7011744B2Mar 14, 2006
Brine supply unit
ANELVA CORP0 citations37