Inventor
TACHIKAWA TOSHIHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TACHIKAWA TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NHK SPRING CO LTD
8 patentsUS7503980B2Mar 17, 2009
Substrate supporting apparatus
NHK SPRING CO LTD527 citations96
US6376808B2Apr 23, 2002
Heating apparatus
NHK SPRING CO LTD41 citations92
US7372001B2May 13, 2008
Ceramics heater
NHK SPRING CO LTD31 citations90
US7241346B2Jul 10, 2007
Apparatus for vapor deposition
NHK SPRING CO LTD16 citations83
US5092568AMar 3, 1992
Coil spring device
NHK SPRING CO LTD20 citations81
US7851728B2Dec 14, 2010
Heater unit
NHK SPRING CO LTD4 citations61
US7045747B2May 16, 2006
Heater unit
NHK SPRING CO LTD5 citations61
US10276410B2Apr 30, 2019
Substrate support device
NHK SPRING CO LTD0 citations36