Inventor

INOKUCHI TADASHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “INOKUCHI TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

2 patents

US7220319B2May 22, 2007

Electrostatic chucking stage and substrate processing apparatus

CANON ANELVA CORP25 citations91

USRE42175EMar 1, 2011

Electrostatic chucking stage and substrate processing apparatus

CANON ANELVA CORP2 citations61

(unassigned)

1 patent

US6535371B1Mar 18, 2003

Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly

32 citations87