Inventor

WANG PEI-JAN

TW6 patents

⚠️ This page may combine multiple inventors who share the name “WANG PEI-JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOSEL VITELIC INC

3 patents

US5776833AJul 7, 1998

Method for forming metal plug

MOSEL VITELIC INC32 citations89

US5770515AJun 23, 1998

Method of in-situ wafer cooling for a sequential WSI/alpha -Si sputtering process

MOSEL VITELIC INC18 citations85

US5963830AOct 5, 1999

Method of forming a TiN/W barrier layer for a hot Al plug

MOSEL VITELIC INC8 citations71

TAIWAN SEMICONDUCTOR MFG

2 patents

US5180689AJan 19, 1993

Tapered opening sidewall with multi-step etching process

TAIWAN SEMICONDUCTOR MFG62 citations94

US5629237AMay 13, 1997

Taper etching without re-entrance profile

TAIWAN SEMICONDUCTOR MFG53 citations89

NAT SCIENCE COUNCIL

1 patent

US5670016ASep 23, 1997

Method for cleaning substrate prior to tungsten deposition

NAT SCIENCE COUNCIL2 citations60