Inventor · disambiguated record

Yeong Rvey Shiue

Also filed as: SHIUE YEONG RVEY

1 granted patent·18 citations·filing 1996–1996

39Inventor score

Technology areasH10P

Files withMOSEL VITELIC INC1

Top patents by PatentIndex Score

1 record

0146US5770515AMethod of in-situ wafer cooling for a sequential WSI/alpha -Si sputtering processMOSEL VITELIC INC·Filed 1996·Granted Jun 23, 1998·18 cites·2 claims

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