Inventor
LO CHI-FUNG
US13 patents
⚠️ This page may combine multiple inventors who share the name “LO CHI-FUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PRAXAIR TECHNOLOGY INC
6 patentsUS6328927B1Dec 11, 2001
Method of making high-density, high-purity tungsten sputter targets
PRAXAIR TECHNOLOGY INC83 citations97
US6165413ADec 26, 2000
Method of making high density sputtering targets
PRAXAIR TECHNOLOGY INC55 citations95
US6056857AMay 2, 2000
Cryogenic annealing of sputtering targets
PRAXAIR TECHNOLOGY INC83 citations95
US6086735AJul 11, 2000
Contoured sputtering target
PRAXAIR TECHNOLOGY INC47 citations92
US6299831B1Oct 9, 2001
High performance Cu/Cr sputter targets for semiconductor application
PRAXAIR TECHNOLOGY INC15 citations83
US6582641B1Jun 24, 2003
Apparatus and method for making metal oxide sputtering targets
PRAXAIR TECHNOLOGY INC14 citations80
SONY CORP
5 patentsUS5993575ANov 30, 1999
Method for fabricating randomly oriented aluminum alloy sputting targets with fine grains and fine precipitates
SONY CORP44 citations95
US5766380AJun 16, 1998
Method for fabricating randomly oriented aluminum alloy sputtering targets with fine grains and fine precipitates
SONY CORP52 citations95
US5896553AApr 20, 1999
Single phase tungsten-titanium sputter targets and method of producing same
SONY CORP39 citations92
US6042777AMar 28, 2000
Manufacturing of high density intermetallic sputter targets
SONY CORP45 citations91
US5656216AAug 12, 1997
Method for making metal oxide sputtering targets (barrier powder envelope)
SONY CORP14 citations71