Inventor
PETACH MICHAEL B
US12 patents
⚠️ This page may combine multiple inventors who share the name “PETACH MICHAEL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TRW INC
4 patentsUS6324256B1Nov 27, 2001
Liquid sprays as the target for a laser-plasma extreme ultraviolet light source
TRW INC54 citations94
US6281607B1Aug 28, 2001
Electric motor with vibration attenuation
TRW INC24 citations92
US6158983ADec 12, 2000
Pump having muffler for attenuating noise
TRW INC28 citations92
US5961309AOct 5, 1999
Gear pump with noise attenuation
TRW INC28 citations88
NORTHROP GRUMMAN CORP
4 patentsUS6792076B2Sep 14, 2004
Target steering system for EUV droplet generators
NORTHROP GRUMMAN CORP21 citations91
US6738452B2May 18, 2004
Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source
NORTHROP GRUMMAN CORP28 citations88
US6744851B2Jun 1, 2004
Linear filament array sheet for EUV production
NORTHROP GRUMMAN CORP11 citations72
US6657213B2Dec 2, 2003
High temperature EUV source nozzle
NORTHROP GRUMMAN CORP12 citations72
UNIV CENTRAL FLORIDA RES FOUND
3 patentsUS6835944B2Dec 28, 2004
Low vapor pressure, low debris solid target for EUV production
UNIV CENTRAL FLORIDA RES FOUND15 citations82
US6912267B2Jun 28, 2005
Erosion reduction for EUV laser produced plasma target sources
UNIV CENTRAL FLORIDA RES FOUND9 citations72
US6864497B2Mar 8, 2005
Droplet and filament target stabilizer for EUV source nozzles
UNIV CENTRAL FLORIDA RES FOUND5 citations61