Inventor

MANN KLAUS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MANN KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAMBDA PHYSIK AG

2 patents

US6389045B1May 14, 2002

Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers

LAMBDA PHYSIK AG87 citations96

US6624424B2Sep 23, 2003

VUV laser beam characterization system

LAMBDA PHYSIK AG18 citations81

LAMBDA PHYSIK GMBH

1 patent

US6014206AJan 11, 2000

Stabilization of angular and lateral laser beam position

LAMBDA PHYSIK GMBH79 citations93