Inventor
CHOI JINHAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “CHOI JINHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9425058B2Aug 23, 2016
Simplified litho-etch-litho-etch process
APPLIED MATERIALS INC145 citations95
US7368392B2May 6, 2008
Method of fabricating a gate structure of a field effect transistor having a metal-containing gate electrode
APPLIED MATERIALS INC7 citations72
US9064812B2Jun 23, 2015
Aspect ratio dependent etch (ARDE) lag reduction process by selective oxidation with inert gas sputtering
APPLIED MATERIALS INC6 citations68
US7754610B2Jul 13, 2010
Process for etching tungsten silicide overlying polysilicon particularly in a flash memory
APPLIED MATERIALS INC2 citations59
US11437230B2Sep 6, 2022
Amorphous carbon multilayer coating with directional protection
APPLIED MATERIALS INC0 citations58
US10586696B2Mar 10, 2020
Halogen abatement for high aspect ratio channel device damage layer removal for EPI growth
APPLIED MATERIALS INC0 citations37
US9627216B2Apr 18, 2017
Method for forming features in a silicon containing layer
APPLIED MATERIALS INC0 citations37