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Inventor
JANG BI
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “JANG BI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US7910491B2
Mar 22, 2011
Gapfill improvement with low etch rate dielectric liners
APPLIED MATERIALS INC
90 citations
95
US7754610B2
Jul 13, 2010
Process for etching tungsten silicide overlying polysilicon particularly in a flash memory
APPLIED MATERIALS INC
2 citations
59
(unassigned)
1 patent
US6756313B2
Jun 29, 2004
Method of etching silicon nitride spacers with high selectivity relative to oxide in a high density plasma chamber
22 citations
89