Inventor
KAVANAGH ROBERT J
US7 patents
⚠️ This page may combine multiple inventors who share the name “KAVANAGH ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIPLEY CO LLC
5 patentsUS6692888B1Feb 17, 2004
Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same
SHIPLEY CO LLC56 citations94
US6841331B2Jan 11, 2005
Polymers, processes for polymer synthesis and photoresist compositions
SHIPLEY CO LLC10 citations70
US7205087B2Apr 17, 2007
Solvents and photoresist compositions for 193 nm imaging
SHIPLEY CO LLC2 citations61
US7090968B2Aug 15, 2006
Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same
SHIPLEY CO LLC1 citations51
US7208261B2Apr 24, 2007
Polymers, processes for polymer synthesis and photoresist compositions
SHIPLEY CO LLC1 citations48