Inventor
USHIDA MASAO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “USHIDA MASAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
9 patentsUSD568839SMay 13, 2008
Photomask blank
HOYA CORP9 citations82
USD543160SMay 22, 2007
Photomask blank
HOYA CORP13 citations82
US4563407AJan 7, 1986
Photo-mask blank comprising a shading layer having a variable etch rate
HOYA CORP20 citations78
US7166392B2Jan 23, 2007
Halftone type phase shift mask blank and halftone type phase shift mask
HOYA CORP9 citations73
US4696877ASep 29, 1987
Photo-mask blank comprising a shading layer having a variable etch rate
HOYA CORP12 citations69
US7611808B2Nov 3, 2009
Halftone type phase shift mask blank and halftone type phase shift mask
HOYA CORP3 citations62
US7217481B2May 15, 2007
Photomask blank, photomask, methods of manufacturing the same and methods of forming micropattern
HOYA CORP2 citations59
US7901842B2Mar 8, 2011
Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device
HOYA CORP1 citations51
US7781125B2Aug 24, 2010
Lithography mask blank
HOYA CORP0 citations41