Inventor
TRENTMAN BRIAN M
US4 patents
Patents
4 patentsUS6921721B2Jul 26, 2005
Post plasma clean process for a hardmask
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US7384869B2Jun 10, 2008
Protection of silicon from phosphoric acid using thick chemical oxide
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US6905943B2Jun 14, 2005
Forming a trench to define one or more isolation regions in a semiconductor structure
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US7887875B2Feb 15, 2011
Method to reduce photoresist poisoning
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