Inventor
GONZALEZ JR DAVID
US3 patents
Patents
3 patentsUS6730597B1May 4, 2004
Pre-ECD wet surface modification to improve wettability and reduced void defect
TEXAS INSTRUMENTS INC13 citations82
US7863192B2Jan 4, 2011
Methods for full gate silicidation of metal gate structures
TEXAS INSTRUMENTS INC4 citations60
US6811669B2Nov 2, 2004
Methods and apparatus for improved current density and feature fill control in ECD reactors
TEXAS INSTRUMENTS INC5 citations58