Inventor

KAWAJI TATSUYA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KAWAJI TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7992318B2Aug 9, 2011

Heating apparatus, heating method, and computer readable storage medium

TOKYO ELECTRON LTD553 citations97

US10217652B2Feb 26, 2019

Heat treatment apparatus, heat treatment method, and storage medium

TOKYO ELECTRON LTD3 citations69

KAWAJI TATSUYA

1 patent

US8186077B2May 29, 2012

Heating apparatus, heating method, and computer readable storage medium

KAWAJI TATSUYA5 citations67