Inventor
YAMADA KAORU
JP22 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA KAORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS6932884B2Aug 23, 2005
Substrate processing apparatus
EBARA CORP26 citations92
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US7476290B2Jan 13, 2009
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations82
US7578886B2Aug 25, 2009
Substrate processing apparatus, substrate processing method, and substrate holding apparatus
EBARA CORP14 citations81
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62