Inventor
SHINOHARA KENSUKE
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SHINOHARA KENSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
2 patentsSCREEN HOLDINGS CO LTD
2 patentsUS12176215B2Dec 24, 2024
Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium
SCREEN HOLDINGS CO LTD0 citations48
US12476124B2Nov 18, 2025
Substrate processing condition setting method, substrate processing method, substrate processing condition setting system, and substrate processing system
SCREEN HOLDINGS CO LTD0 citations44