Inventor
HATTORI NAO
JP7 patents
Patents
7 patentsUS9576835B2Feb 21, 2017
Workpiece processing method
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US10727127B2Jul 28, 2020
Method of processing a substrate
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US9831128B2Nov 28, 2017
Method of processing a substrate
DISCO CORP0 citations50
US9721809B2Aug 1, 2017
Method of forming gettering layer
DISCO CORP0 citations50
US10535565B2Jan 14, 2020
Workpiece dividing method
DISCO CORP0 citations47
US10702946B2Jul 7, 2020
Substrate processing method
DISCO CORP0 citations40
US10580697B2Mar 3, 2020
Workpiece dividing method
DISCO CORP0 citations36