Inventor

MOON PYUNG

KR3 patents

Patents

3 patents

US10037870B2Jul 31, 2018

Method for preparing hydrogen plasma annealing treatment, method for performing hydrogen plasma annealing treatment, and apparatus therefor

SAMSUNG ELECTRONICS CO LTD0 citations49

US10262841B2Apr 16, 2019

Plasma monitoring device

SAMSUNG ELECTRONICS CO LTD0 citations36

US10607832B2Mar 31, 2020

Method and apparatus for forming a thin layer

SAMSUNG ELECTRONICS CO LTD0 citations35