Inventor
EBRISH MONA
US4 patents
Patents
4 patentsUS10811528B2Oct 20, 2020
Two step fin etch and reveal for VTFETs and high breakdown LDVTFETs
IBM7 citations83
US10734523B2Aug 4, 2020
Nanosheet substrate to source/drain isolation
IBM6 citations72
US10804106B2Oct 13, 2020
High temperature ultra-fast annealed soft mask for semiconductor devices
IBM0 citations51
US10361127B1Jul 23, 2019
Vertical transport FET with two or more gate lengths
IBM0 citations51