Inventor
HWANG KWANGTAE
KR7 patents
⚠️ This page may combine multiple inventors who share the name “HWANG KWANGTAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS10453796B2Oct 22, 2019
Semiconductor memory device having capping pattern defining top surface of air gap
SAMSUNG ELECTRONICS CO LTD9 citations83
US11264219B2Mar 1, 2022
Radical monitoring apparatus and plasma apparatus including the monitoring apparatus
SAMSUNG ELECTRONICS CO LTD2 citations69
US11837545B2Dec 5, 2023
Semiconductor memory device
SAMSUNG ELECTRONICS CO LTD1 citations61
US10347527B2Jul 9, 2019
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US9997400B2Jun 12, 2018
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US11450554B2Sep 20, 2022
Method of forming material film, integrated circuit device, and method of manufacturing the integrated circuit device
SAMSUNG ELECTRONICS CO LTD0 citations48