Inventor
JAVAHERI NARJES
NL4 patents
Patents
4 patentsUS12105432B2Oct 1, 2024
Metrology method and associated computer product
ASML NETHERLANDS BV2 citations65
US11448974B2Sep 20, 2022
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations57
US10990020B2Apr 27, 2021
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations57
US10705437B2Jul 7, 2020
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations38