Inventor
HAJIAHMADI MOHAMMADREZA
NL11 patents
Patents
11 patentsUS10481506B2Nov 19, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US11181828B2Nov 23, 2021
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method
ASML NETHERLANDS BV2 citations67
US12105432B2Oct 1, 2024
Metrology method and associated computer product
ASML NETHERLANDS BV2 citations65
US11009345B2May 18, 2021
Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient
ASML NETHERLANDS BV0 citations59
US11448974B2Sep 20, 2022
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations57
US10990020B2Apr 27, 2021
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations57
US12379670B2Aug 5, 2025
Substrate, patterning device and metrology apparatuses
ASML NETHERLANDS BV0 citations56
US12112260B2Oct 8, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations50
US10794693B2Oct 6, 2020
Metrology method, apparatus and computer program
ASML NETHERLANDS BV0 citations49
US10451978B2Oct 22, 2019
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations49
US10705437B2Jul 7, 2020
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations38