Inventor
SANGUINETTI GONZALO ROBERTO
NL7 patents
Patents
7 patentsUS10859923B2Dec 8, 2020
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US10564552B2Feb 18, 2020
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations61
US11604419B2Mar 14, 2023
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US11448974B2Sep 20, 2022
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations57
US11022897B2Jun 1, 2021
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US10990020B2Apr 27, 2021
Metrology parameter determination and metrology recipe selection
ASML NETHERLANDS BV0 citations57
US10705430B2Jul 7, 2020
Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations56