Inventor
TSUDA EINOSUKE
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TSUDA EINOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10950417B2Mar 16, 2021
Substrate processing apparatus and substrate loading mechanism
TOKYO ELECTRON LTD2 citations70
US12094753B2Sep 17, 2024
Stage device and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11393696B2Jul 19, 2022
Method of controlling substrate treatment apparatus, substrate treatment apparatus, and cluster system
TOKYO ELECTRON LTD0 citations60
US11281116B2Mar 22, 2022
Substrate stage and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US9984892B2May 29, 2018
Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system
TOKYO ELECTRON LTD1 citations51
US12476091B2Nov 18, 2025
Electrostatic chuck and method of operation for plasma processing
TOKYO ELECTRON LTD0 citations50
US11193205B2Dec 7, 2021
Source material container
TOKYO ELECTRON LTD0 citations48