Inventor
IWAOKA HIROAKI
JP10 patents
Patents
10 patentsUS12001134B2Jun 4, 2024
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC2 citations71
US12346018B2Jul 1, 2025
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations61
US12298660B2May 13, 2025
Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same
AGC INC0 citations59
US12222640B2Feb 11, 2025
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations59
US12105412B2Oct 1, 2024
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations59
US11953822B2Apr 9, 2024
Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same
AGC INC0 citations59
US11829065B2Nov 28, 2023
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC1 citations59
US12235574B2Feb 25, 2025
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations50
US12339580B2Jun 24, 2025
Reflective mask blank for EUV lithography and substrate equipped with conductive film
AGC INC0 citations45
US10287676B2May 14, 2019
Thin film formation method, thin film, and glass plate having thin film attached thereto
AGC INC0 citations36