Inventor

RADHAKRISHNAN SATISH

US22 patents

⚠️ This page may combine multiple inventors who share the name “RADHAKRISHNAN SATISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RADHAKRISHNAN SATISH

APPLIED MATERIALS INC

Apparatus and method for controlling a flow process material to a deposition chamber

Evaporator chamber for forming films on substrates

Targeted heat control systems

Showerhead for providing multiple materials to a process chamber

Reducing substrate surface scratching using machine learning

Apparatus and method for controlling a flow process material to a deposition chamber

Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors

Segmented showerhead for uniform delivery of multiple precursors

Methods for forming films on substrates

Radiation shield modification for improving substrate temperature uniformity

Methods for forming films on substrates

Systems and methods for substrate support temperature control

Reducing substrate surface scratching using machine learning

Thermally controlled lid stack components

Two-piece RF shield design

Heated pedestal design for improved heat transfer and temperature uniformity

Cover wafer for semiconductor processing chamber

Thermal choke plate

Dual channel showerhead assembly

INTEL CORP

Debond interconnect structures

Debond interconnect structures

MA QING

Debond interconnect structures