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Inventor
VELAGA ANKINEEDU
US
5 patents
⚠️ This page may combine multiple inventors who share the name “VELAGA ANKINEEDU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AT & T BELL LAB
2 patents
US5147820A
Sep 15, 1992
Silicide formation on polysilicon
AT & T BELL LAB
68 citations
95
US5328872A
Jul 12, 1994
Method of integrated circuit manufacturing using deposited oxide
AT & T BELL LAB
9 citations
72
LUCENT TECHNOLOGIES INC
1 patent
US6358785B1
Mar 19, 2002
Method for forming shallow trench isolation structures
LUCENT TECHNOLOGIES INC
26 citations
91
APPLIED MATERIALS INC
1 patent
US6218300B1
Apr 17, 2001
Method and apparatus for forming a titanium doped tantalum pentaoxide dielectric layer using CVD
APPLIED MATERIALS INC
15 citations
82
AGERE SYST GUARDIAN CORP
1 patent
US6500729B1
Dec 31, 2002
Method for reducing dishing related issues during the formation of shallow trench isolation structures
AGERE SYST GUARDIAN CORP
10 citations
72