Inventor
OLESEN MICHAEL B
US9 patents
⚠️ This page may combine multiple inventors who share the name “OLESEN MICHAEL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERTEQ INC
7 patentsUS5908509AJun 1, 1999
Semiconductor wafer cleaning system
VERTEQ INC106 citations98
US5656097AAug 12, 1997
Semiconductor wafer cleaning system
VERTEQ INC263 citations98
US6378534B1Apr 30, 2002
Semiconductor wafer cleaning system
VERTEQ INC60 citations96
US5996595ADec 7, 1999
Semiconductor wafer cleaning system
VERTEQ INC46 citations96
US5950645ASep 14, 1999
Semiconductor wafer cleaning system
VERTEQ INC48 citations96
US6679272B2Jan 20, 2004
Megasonic probe energy attenuator
VERTEQ INC37 citations92
US6122837ASep 26, 2000
Centrifugal wafer processor and method
VERTEQ INC30 citations92