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Inventor

METT RICHARD R

US11 patents
⚠️ This page may combine multiple inventors who share the name “METT RICHARD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

7 patents
US6198616B1Mar 6, 2001

Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system

APPLIED MATERIALS INC271 citations98
US6005376ADec 21, 1999

DC power supply

APPLIED MATERIALS INC22 citations92
US6500299B1Dec 31, 2002

Chamber having improved gas feed-through and method

APPLIED MATERIALS INC37 citations91
US5989349ANov 23, 1999

Diagnostic pedestal assembly for a semiconductor wafer processing system

APPLIED MATERIALS INC36 citations91
US5952896ASep 14, 1999

Impedance matching network

APPLIED MATERIALS INC51 citations89
US6273736B1Aug 14, 2001

Safety guard for an RF connector

APPLIED MATERIALS INC6 citations71
US6539621B1Apr 1, 2003

Safety guard for an RF connector

APPLIED MATERIALS INC2 citations60

APPLIED MATERIAL INC

1 patent
US6605177B2Aug 12, 2003

Substrate support with gas feed-through and method

APPLIED MATERIAL INC15 citations91

HYDE JAMES S

1 patent
US8674694B2Mar 18, 2014

Coil system and method for post-exposure dosimetry using electron paramagnetic resonance spectroscopy

HYDE JAMES S12 citations76

MCW RES FOUND INC

1 patent
US6828789B2Dec 7, 2004

Cavity resonator for electron paramagnetic resonance spectroscopy having axially uniform field

MCW RES FOUND INC9 citations73

MEDICAL COLLEGE WISCONSIN INC

1 patent
US11385307B2Jul 12, 2022

Strongly coupled fourth-order resonance coil systems for enhanced signal detection

MEDICAL COLLEGE WISCONSIN INC0 citations59