Inventor

LIM CHENG-CHUNG

SG3 patents

⚠️ This page may combine multiple inventors who share the name “LIM CHENG-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

1 patent

US8021492B2Sep 20, 2011

Method of cleaning turbo pump and chamber/turbo pump clean process

UNITED MICROELECTRONICS CORP2 citations52

POH KIAN-SOONG

1 patent

US8277567B2Oct 2, 2012

Method of cleaning turbo pump and chamber/turbo pump clean process

POH KIAN-SOONG0 citations35

LIM CHENG-CHUNG

1 patent

US8328938B2Dec 11, 2012

Buffer apparatus and thin film deposition system

LIM CHENG-CHUNG0 citations33