Inventor
KADOSHIMA TAKAYUKI
JP8 patents
Patents
8 patentsUS6674066B1Jan 6, 2004
Encoder
CANON KK20 citations92
US6618218B1Sep 9, 2003
Displacement detecting apparatus and information recording apparatus
CANON KK28 citations92
US5956140ASep 21, 1999
Displacement detection apparatus and drive control apparatus using the same constructed to prevent collision between gratings
CANON KK28 citations91
US6473184B1Oct 29, 2002
Interferometer which divides light beams into a plurality of beams with different optical paths
CANON KK15 citations84
US6657181B1Dec 2, 2003
Optical element used in compact interference measuring apparatus detecting plurality of phase difference signals
CANON KK11 citations73
US6570660B2May 27, 2003
Measuring instrument
CANON KK9 citations73
US7375820B2May 20, 2008
Interference measuring apparatus for detecting a plurality of stable phase difference signals
CANON KK2 citations62
US7034947B2Apr 25, 2006
Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation
CANON KK2 citations62