Inventor
HARINK THIJS
NL3 patents
Patents
3 patentsUS7522258B2Apr 21, 2009
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
ASML NETHERLANDS BV3 citations60
US7274431B2Sep 25, 2007
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations60
US7126664B2Oct 24, 2006
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV4 citations60